Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Plasma Processes and Polymers
سال: 2007
ISSN: 1612-8850,1612-8869
DOI: 10.1002/ppap.200731301